Plasma Coating

Meyer Burger offers know-how and processes for a wide range of vacuum process technologies.

Meyer Burger established advanced plasma based deposition technologies on its equipment. There are for example layouts for full Halogen compatibility of the equipment in reactive ion etching (RIE) to achieve a favorable process homogeneity and stability.


Sales MicroSystems

+49 3723 671 234

Sales Meyer Burger (Netherlands) B.V.

+31 (0) 40 2581 581