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FLEx R2R PECVD

High throughput roll-to-roll plasma coating technology

The FLEx R2R PECVD is a thermal plasma-based PECVD piece of production equipment for the deposition of thin and thick R2R films for various appli

The FLEx R2R PECVD platform combines our high deposition rate plasma

sources with roll-to-roll technology. Using either expanding thermal

plasma (ETP) or linear microwave plasma (LMW) sources, FLEx R2R PECVD

tools are designed to deposit coatings with optical, electrical or

barrier functionality. Using a range of precursor materials, thin films

of SiNx, SiOx, aSi, SiC, AlOx, ZnO, DLC or aC can be deposited.

 

 

Example applications

 

 

Applying a linear

microwave source, the FLEx R2R PECVD is an ideal tool to produce

moisture barrier coatings on polymer films. It produces SiNx layers with

an intrinsic water vapor transmission rate of 10-5 g/m2/day [sub en

superscripts] at 250 nm/min at superb homogeneity. Using the unique low

temperature characteristics of microwave plasma, the process is

compatible with both PET and PEN polymer films.

Using expanding thermal plasma sources, the platform

is used to enhance lithium ion battery anode foils with an amorphous

silicon coating. The unparalleled deposition rate of > 1 micron/min

yields a loading of 5 mg/cm2 of silicon. Even on highly texturized

foils, the tool achieves excellent conformity.

 

 

 

 

 

 

 

 

Main advantages

 

 

  • High deposition rate and low cost of ownership
  • Excellent conformity
  • Low ion bombardment
  • Wide range of process temperatures
  • Compatible with range of precursors, plasma sources enabling a wide range of application

 

 

 

Key features

  • Single or double sided processing
  • Ready for metal and polymer foils
  • Roll exchange without breaking process vacuum
  • Expandable with additional process modules through modular design

Contact

Sales Meyer Burger (Netherlands) B.V.

+31 (0) 40 2581 581

Product Detail

Location

Meyer Burger (Netherlands) B.V.

Luchthavenweg 10
NL-5657 Eindhoven

+31 4025 81581

+31 40 2350 645

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