Tamiris

Inhouse developed ion sources ranging from 40 mm to 2,000 mm beam dimension

The tamiris sources use a patented electron cyclotron resonance (ECR) based microwave plasma excitation

The tamiris sources use a patented electron cyclotron resonance (ECR)

based microwave plasma excitation. For microwave coupling a local stub

antenna is used. This excitation principle is quite robust even in harsh

environments and allows also a modular scaling of this excitation

principle. Besides the circular sources, these microwave antennas can

also be arranged in a row forming a quasi-linear plasma excitation.

These linear sources are available with 380 mm or 580 mm beam dimension.

Customized configurations are available with a 2,000 mm length or

longer.

Contact

Sales MicroSystems

+49 3723 671 234

Type

tamiris 120-f

tamiris 120-a

tamiris 220-f

tamiris 400-l

tamiris 600-l

Grids Dimension

120 mm

120 mm

218 mm

380 mm x 110 mm

580 mm x 110 mm

Grids

3 grid, flat and collimating with different focus length, C and Mo

3 grid, flat and collimating with different focus length, C and Mo

3 grid, flat and collimating with different focus length, C and Mo

3 grid, flat and cylindrical with different focus length, C and Mo

3 grid, flat and cylindrical with different focus length, C and Mo

Mounting

DN 150

DN 250 adjustable

DN 350

Special

Special

Energy/ Current

2.0 keV / 350 mA

2.0 keV / 350 mA

2.0 keV /

450 mA

2.0 keV /

500 mA

2.0 keV /

750 mA

Cooling

Water

Water

Water

Water

Water

Gases

Noble gases, O2, N2, Halogen containing gases

Noble gases, O2, N2, Halogen containing gases

Noble gases, O2, N2, Halogen containing gases

Noble gases, O2, N2, Halogen containing gases

Noble gases, O2, N2, Halogen containing gases

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