Plasma Coating

Meyer Burger offers know-how and processes for a wide range of vacuum process technologies.

Meyer Burger established advanced plasma based deposition technologies on its equipment. There are for example layouts for full Halogen compatibility of the equipment in reactive ion etching (RIE) to achieve a favorable process homogeneity and stability.

Kontakt

Sales MicroSystems

+49 3723 671 234

Sales Meyer Burger (Netherlands) B.V.

+31 (0) 40 2581 581

Plasma Coating technologies

CVD

Chemical vapour deposition

PECVD

Plasma-enhanced chemical vapour deposition

MW PECVD

Microwave plasma-enhanced chemical vapour deposition

PVD

Physical vapour deposition