FLEx R2R sALD

Spatial ALD coating technology

The FLEx R2R sALD is a ALD piece of production equipment for the deposition of thin R2R films

Atomic layer deposition (ALD) technology uses cyclic exposure of a substrate to different precursors where in each cycle a layer is formed of a single atom thickness. This ensures superior thickness control, extreme layer homogeneity and superb conformity without cost of vacuum tooling.

Spatial ALD (s-ALD) is the enhanced form of traditional ALD improving the deposition rate by several orders of magnitude.

The FLEx RS is a Roll to Roll Spatial ALD production solution for many applications, like Optically transparent barrier films, Optical stack development, Zn(O,S) buffer layers for CIGS, that require these benefits of s-ALD.

Next to high throughput the FLEx platform approach enables integration of various additional coatings and pre-treatment technologies.

Main advantages

  • Deposition rates > 1 nm/s; 100 times faster compared to conventional ALD
  • Large range of applications with variety of precursors
  • Enable multi-material stack with multiple precursors
  • Process at atmospheric pressure (no vacuum process)
  • Thickness control at atomic scale
  • Straightforward adjustment of layer thickness
  • Excellent conformity
  • No pinholes
  • No contact on deposition side of foil
  • No parasitic deposition
  • Compact equipment footprint

Key features

  • Accurate controlled exposure time  and process temperature
  • High precision rotating spatial ALD drum and WEB tension control
  • High precision WEB unwinding and rewinding modules
  • High uptime
  • Flexibility in foil type and layer thickness
  • Scalable platform
  • 24/7 volume production
  • Customizable configuration
  • Various optional modules available

Contact

Sales Meyer Burger (Netherlands) B.V.

+31 (0) 40 2581 581

Location

Meyer Burger (Netherlands) B.V.

Luchthavenweg 10
NL-5657 Eindhoven

+31 4025 81581

+31 40 2350 645

Similar Products

PECVD coating & stripping equipment

FLEx LT

The FLEx LT is a thermal plasma-based PECVD piece of R&D equipment for the deposition of thin and thick S2S films for various applications like...

High throughput roll-to-roll plasma coating technology

FLEx R2R PECVD

The FLEx R2R PECVD is a thermal plasma-based PECVD piece of production equipment for the deposition of thin and thick R2R films for various appli ...

Spatial ALD coating technology

FLEx S2S sALD

The FLEx S2S sALD is suitable for application development that require high speed ALD coating technology combined with excellent uniformity ...

High throughput S2S PECVD technology

FLEx XL

The FLEx XL is a thermal plasma-based PECVD piece of production equipment for the deposition of thin and thick S2S films for various applications ...