FLEx R2R sALD

Spatial ALD coating technology

The FLEx R2R sALD is a ALD piece of production equipment for the deposition of thin R2R films

 

Atomic layer deposition (ALD) technology uses cyclic exposure of a

substrate to different precursors where in each cycle a layer is formed

of a single atom thickness. This ensures superior thickness control,

extreme layer homogeneity and superb conformity without cost of vacuum

tooling.

 

 

Spatial ALD (s-ALD) is the enhanced form of traditional ALD improving the deposition rate by several orders of magnitude.

 

 

 

The FLEx RS is a Roll to Roll Spatial ALD

production solution for many applications, like Optically transparent

barrier films, Optical stack development, Zn(O,S) buffer layers for

CIGS, that require these benefits of s-ALD.

 

 

 

Next to high throughput the FLEx platform approach

enables integration of various additional coatings and pre-treatment

technologies.

 

 

 

 

 

 

 

 

 

Main advantages

  • Deposition rates > 1 nm/s; 100 times faster compared to conventional ALD
  • Large range of applications with variety of precursors
  • Enable multi-material stack with multiple precursors
  • Process at atmospheric pressure (no vacuum process)
  • Thickness control at atomic scale
  • Straightforward adjustment of layer thickness
  • Excellent conformity
  • No pinholes
  • No contact on deposition side of foil
  • No parasitic deposition
  • Compact equipment footprint

 

 

Key features

  • Accurate controlled exposure time  and process temperature
  • High precision rotating spatial ALD drum and WEB tension control
  • High precision WEB unwinding and rewinding modules
  • High uptime
  • Flexibility in foil type and layer thickness
  • Scalable platform
  • 24/7 volume production
  • Customizable configuration
  • Various optional modules available

Contact

Sales Meyer Burger (Netherlands) B.V.

+31 (0) 40 2581 581

Events

21.01. - 25.01.2018
MEMS 2018
Belfast Waterfront, Belfast, UK
31.01. - 02.02.2018
SPIE Photonics West
The Moscone Center, San Francisco (CA), USA
12.02. - 15.02.2018
2018FLEX Conference
Hyatt Regency, Monterey (CA), USA

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