Business Unit MicroSystems

We provide advanced solutions in plasma and ion beam technology for applications in the semiconductor industry, in the production of high precision optics and sensors and many more high-tech markets as well as for research and development.

With its 100 employees, MicroSystems serves as supplier for customized equipment for high-tech industry, including control-software, after-sales service and consultancy.

The company has set up an excellent infrastructure for the manufacture of its process systems. The new production area includes one outstanding cleanroom of class 10,000 (ISO 7) with 700 m² and one heavy goods crane (up to 15.000 kg), where the systems for microtechnology and the optical industry are configured and put into operation.

Customized solutions, short lead time and high quality service are guaranteed by an in-house engineering and technical expert team.

MicroSystems is a strategic business unit of Meyer Burger (Germany) AG and is located in Hohenstein-Ernstthal, near Chemnitz, Germany. Meyer Burger (Germany) is certified with the ISO 9001 standard.