Silicon nano particles produced on Meyer Burger coating systems lead to a significant capacity increase in lithium ion batteries.

Battery technology is becoming ever more important. The demand for use in mobile devices is constantly increasing, electro mobility is becoming more and more relevant, and with regard to renewable energy, batteries are able to bridge the gap between the time of electricity production and its consumption.

  • We supply the battery industry with equipment for the coating process as well as with software and automation solutions.
  • In the coating area, Meyer Burger provides plasma-based solutions as well as “roll-to-roll” and “sheet-to-sheet” solutions based on atomic layer deposition.
  • Software solutions are also part of the Meyer Burger product portfolio. Meyer Burger sells solutions for automation, control (of system component groups, cluster tools and inline systems), interfaces and machine data collection. It also offers a development platform for creating automation software. 


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Our products

Thin Film Encapsulation


For the encapsulation of sensitive electronics like OLEDs and thin film photovoltaic devices, we develop integrated tools containing a FLEX LT PE ...

Automation & Software
Production Line Control

FabEagle LC

FabEagle®LC is a modular system software for complete line control solutions for your production line.

Automation & Software
Equipment Integration

FabEagle Link

Software solution for the integration of process equipment, handling systems and metering equipment in the production IT.

Automation & Software
Manufacturing Execution Systems

FabEagle MES

Our MES (Manufacturing Execution System) FabEagle®MES provides all functions for a comfortable, scalable production control.

Automation & Software
OEE - Equipment Perfomrance Analysis

FabEagle TFM

Powerful software solution for Equipment Performance Tracking (EPT) combined with online equipment monitoring.

Automation & Software
Manufacturing Dashboard

FabEagle TFM moblie

FabEagle®TFM mobile is an extension module of FabEagle®TFM for mobile users.

PECVD coating & stripping equipment


The FLEx LT is a thermal plasma-based PECVD piece of R&D equipment for the deposition of thin and thick S2S films for various applications like...

High throughput roll-to-roll plasma coating technology


The FLEx R2R PECVD is a thermal plasma-based PECVD piece of production equipment for the deposition of thin and thick R2R films for various appli ...

High throughput S2S PECVD technology


The FLEx XL is a thermal plasma-based PECVD piece of production equipment for the deposition of thin and thick S2S films for various applications ...

Automation & Software
Cluster Tool Conroller

ToolCommander CTC

The open solution for complex equipment systems.

Automation & Software
Modular Equipment Control

ToolCommander PM

The fastest way to equipment control.

Automation & Software
Software platform

VAC suite

Universal software development system for PC-based process control and visualization.

Automation & Software
Machine data acquisition


Through use of µTFM machine states and errors can be documented and analyzed.