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FLEx R2R sALD

The FLEx R2R sALD is a ALD piece of production equipment for the deposition of thin R2R films.

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FLEx S2S sALD

The FLEx S2S sALD is suitable for application development that require high speed ALD coating technology combined with excellent uniformity.

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FLEx LT

The FLEx LT is a thermal plasma-based PECVD piece of R&D equipment for the deposition of thin and thick S2S films for various applications like photovoltaics, display and batteries...

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CONx TFE

For the encapsulation of sensitive electronics like OLEDs and thin film photovoltaic devices, we develop integrated tools containing a FLEX LT PECVD tool and PiXDRO IP410 inkjet pr...

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