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Ion Beam Etching and Figuring to top

Ionsys 500

The IonSys 500 is a compact and reasonably priced ion beam etching tool for processing of up to 150 mm substrates.

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IonSys 800

The IonSys 800 is designed for industrial ion beam etching and deposition processes with maximum quality and productivity requirements.

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IonSys 1600

The IonSys 1600 is a modern system for complex multi-layer coatings in using dual ion beam deposition.

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Ion Beam Sputter Deposition to top

IonSys 1600

The IonSys 1600 is a modern system for complex multi-layer coatings in using dual ion beam deposition.

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Magnetron Sputter Deposition to top

AK 1000 inline

Multiple process chambers in a serial layout allow the deposition of complex coatings in one process stream.

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Reactive Ion Etching to top

AK 800 / 1000

The AK 800 and 1000 systems differ in maximum sample size and number of linear plasma sources.

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MicroSys 200 / 300

The MicroSys system is designed as a cost effective but high quality solution for research and small scale production applications.


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Plasma Enhanced Chemical Vapor Deposition to top

MicroSys DLC

The MicroSys system is designed as a cost effective and high quality solution for research and production.

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FLEx R2R PECVD

The FLEx R2R PECVD is a thermal plasma-based PECVD piece of production equipment for the deposition of thin and thick R2R films for various applications like photovoltaics, displa...

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FLEx R2R sALD

The FLEx R2R sALD is a ALD piece of production equipment for the deposition of thin R2R films.

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FLEx S2S sALD

The FLEx S2S sALD is suitable for application development that require high speed ALD coating technology combined with excellent uniformity.

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FLEx XL

The FLEx XL is a thermal plasma-based PECVD piece of production equipment for the deposition of thin and thick S2S films for various applications like photovoltaics, display and ba...

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FLEx LT

The FLEx LT is a thermal plasma-based PECVD piece of R&D equipment for the deposition of thin and thick S2S films for various applications like photovoltaics, display and batteries...

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