After the measurement process, the wafer will be sorted softly according to predefined quality criteria into polystyrene boxes. The sorting works using a lift with crossed steel belts. If the wafer is in the middle of the crossed belt, the lift moves up and the crossed belts transport the wafer into the appropriate box.
The wafer sorter module HE-WS-02 achieves a speed of one wafer per second. A sorting unit consists of six sorting stations fcontaining one box each. If a box is filled, the operator exchanges it for an empty one. Meyer Burger recommends to use at least two sorting units.
Meyer Burger also offers a sorter that inserts wafers into carriers.